C00312 - SEMI C3.12 - Specification for Ammonia (NH3) in Cylinders, 99.998% Quality StdPbc-0713 for the deposition of titanium

for the deposition of titanium nitride layers by atomic layer deposition or chemical vapor deposition

TSVを特性化する測定数値を規定するための用語の定義に限定される。この文書は，測定手順は記述していないが，測定量を明確に，有益に，また一義的に規定を行う。

The user is referred to product labels

port converters and other components for 1

1  The scope of this Standard is grades of 4

C00312 - SEMI C3.12 - Specification for Ammonia (NH3) in Cylinders, 99.998% Quality StdPbc-0713 for the deposition of titaniumThe purpose of this Standard is to provide specification for ammonia (NH3) that is used in the semiconductor industry. This Standard covers requirements for ammonia used in the semiconductor industry. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision History SEMI C3. 12 0116 (Reapproved 0922) SEMI C3. 12 0116 (technical revision) SEMI C3. 12 1109 (technical revision) SEMI C3. 12 1102 (technical revision) SEMI C3.