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SEMI P6 — Specification for Registration Marks for Photomasks
This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects
1 SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol
it has become of interest to standardize additional properties of epitaxial wafers
orgで入手可能となる。初版は1990年発行。前版は2007年11月発行。
M01200 - SEMI M12 - ウェーハ表面の連続英数字マーキングの仕様 StdPbc-0320 SEMI P6 — Specification forglobal Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org20067CD ROM1988200311 OCR SOI Referenced SEMI Standards SEMI M13 Specification for Alphanumeric Marking of Silicon Wafers
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