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本安全ガイドラインは，装置のライフサイクルを考慮したリスクアセスメントに適用されることを意図している。
and transient electric and electromagnetic fields
the range for 300 mm wafers
SEMI MF1388-0707 (Reapproved 0412)
SEMI C20-1101 (technical revision)
P02200 - SEMI P22 - Guideline for Photomask Defect Classification and Size Definition Revision:SEMI P22-0699 - Superseded 本安全ガイドラインは，装置のライフサイクルを考慮したリスクアセスメントに適用されることを意図している。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this guideline is to establish standard nomenclature for photomask defect classifications, and to define defect sizing methods. Within this Document only the word photomask will be used, but it is meant to be
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