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This Test Method refers to the analysis of the bulk of the materials
hysteresis
5 µ or less (0
some of which are covered by Related Documents
SEMI M49 — Guide for Specifying Geometry Measurement Systems for Silicon Wafers for the 130 nm to 16 nm Technology Generations
F05400 - SEMI F54 - Test Method for Measuring the Counting Efficiency of Condensation Nucleus Counters StdTpc-Documentation/Training This Test Method refers toThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at www. semiviews. org and www. semi. org in April 2018; originally published June 2000; previously published November 2010. Particle specifications for gases require the use of condensation nucleus counters (CNCs) having specified counting efficiencies.