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In the case of the Guide
The inclusion of eXtensible Markup Language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology
5 The purpose of this technical guide is to make the best practice recommendations regarding materials used in the construction of internal feeders
SEMI C27-0118 (technical revision)
New parties supplying or purchasing Si feedstock materials are entering this industry
E03200 - SEMI E32 - 材料搬送管理スタンダード（MMM） StdPbc-1123 In the case of theNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
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