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orgで入手可能になり，1999年2月発行に至る。初版は1992年発行，前版は1996年発行。
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The Test Method is for use with commercially available carbon analyzers which are based on combustion in an induction furnace principle and use infrared detector as the measuring technique
but are not limited to: SEMI E64 volume at SEMI E15
SEMI102 Artificial Intelligence for Thin Film Manufacturing StdPbc-0425 orgで入手可能になり，1999年2月発行に至る。初版は1992年発行，前版は1996年発行。Course Description This course describes how machine learning and AI based approaches to research, development, and production bring advantages to cleanroom processes. AI based identification of time varying equipment performance and the effects of the previous recipe used on the outcome of the current desired methods are just some ways AI can reduce process variability. The team from Cornell has applied AI approaches to optimize lithography and