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C00357 - SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders StdPbc-0519 Alternative methods may be used

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Description

Alternative methods may be used as long as they have been validated in accordance with the requirements of SEMI C1

particularly SEMI P35

This Test Method describes a procedure which may be used to rank the pitting corrosion resistance of wetted surfaces of tubing or components of finished surfaces intended for use in corrosive gas systems

SEMI C96-0618 (first published)

Each grade of liquid chemicals (1–5) that have been validated analytically using the appropriate procedures described in this Guide can be described as ‘meeting SEMI Specifications

C00357 - SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders StdPbc-0519 Alternative methods may be usedThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published June 2000; previously published March 2012. The purpose of this Document is to provide specification for carbon dioxide (CO2) that is used in the semiconductor industry. This

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