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SEMI E79-0221 (technical revision)
SEMI G87-1108 (Reapproved 1020)
SEMI E174-0618 (technical revision)
1 The purpose of this Standard is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards
The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications
M05600 - SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias StdPbc-1116 SEMI E79-0221 (technical revision)This Practice covers a methodology to determine the costs associated with misclassification of product due to variability and bias of measurement equipment. These costs are associated with failing product that conforms with specifications and passing product that does not conform with specifications. This Practice can be applied to make relative cost comparisons between two or more measurement gauges operating under conditions specified by the user.
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