D01600 - SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port Revision:SEMI D16-0998 - Inactive This Standard is intended to

This Standard is intended to be referenced by other Standards which define specific objects to reduce redundancy

Process technology used in the manufacture of semiconductors and electronic devices continues to achieve increases in active feature density and device complexity

The SEMI World Fab Forecast provides high level summaries

When the liquid phase is exhausted

The purpose of this document is to standardize the method for measurement of electrical and optical characteristics of bent cold cathode fluorescent lamp (CCFL)

D01600 - SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port Revision:SEMI D16-0998 - Inactive This Standard is intended toThis Specification defines feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These feature requirements facilitate the interfacing of transport equipment to the tool by standardizing the feature requirements. Such standards are intended to promote cost effective interfacing while preserving freedom of choice in material handling equipment. Referenced SEMI Standards SEMI D5 Standard Size for