E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling StdPbc-1224 SEMI 3D8-1121 (technical revision)

SEMI 3D8-1121 (technical revision)

SEMI E39 — Specification for Object Services: Concepts

注意： 本文書は，SEMI E54一連のスタンダードとして出版されず，単独で発行および販売される。

3-1016 (technical revision)

2-1016 (technical revision)

E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling StdPbc-1224 SEMI 3D8-1121 (technical revision)The purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and store 450 mm wafers, as specified by SEMI M74, within semiconductor device manufacturing facilities. This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers. This Document is intended to define a set of requirements to ensure