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SEMI C1 — Specification for Reagents
originally published in 1983
3-0915 (Reapproved 0923)
lubricants
This Specification pertains to polymer materials and components consisting of but not limited to the items shown in Table 1 are designed to contain and supply the following
E05400 - SEMI E54 - Specification for Sensor/Actuator Network StdVol-Equipment Automation Software SEMI C1 — Specification forThis Specification provides the structure of SEMIs Sensor Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard compliant Sensor Actuator devices. This Standard specifies how devices interoperate on a network as part of the control system for equipment. This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components