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Organics are present in many materials
SEMI G18-86 (technical revision)
drums in spin rinse dryers
but also the reticles or mirrors to haze
Multicrystalline silicon (mc-Si) wafers produced by casting and controlled solidification usually contain regions containing high grown-in defect density in addition to the grain boundaries
S02200 - SEMI S22 - 半導体製造装置の電気設計のための安全に関するガイドライン Revision:SEMI S22-0718E - Current Organics are present in manyReferenced SEMI Standards SEMI E33 Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility SEMI S1 Safety Guideline for Equipment Safety Labels SEMI S2 Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S3 Safety Guidelines for Heated Chemical Baths SEMI S8 Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment SEMI S10 Safety Guideline for Risk
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