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SEMI E37 — High Speed SECS Message Services (HSMS) Generic Services
本スタンダードは，global Information and Control Committeeで技術的に承認されている。現版は2009年1月2日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年2月にwww
1 These test methods are based on the measurement of surface photovoltage (SPV) as a function of energy (wavelength) of the incident illumination
SEMI MF110-1105 (technical revision)
SEMI M53-0706 (technical revision)
S01500 - SEMI S15 - Safety Guideline for the Evaluation of Toxic and Flammable Gas Detection Systems Revision:SEMI S15-0200 (Withdrawn 0707) - Withdrawn SEMI E37 — High SpeedNOTICE: This Document was balloted and approved for withdrawal in 2007. This guideline provides considerations for the evaluation of fixed gas detection systems used to monitor for safety of plant personnel, product and materials, the local environment and community. It provides an evaluation guide and reference sources appropriate to facilities and equipment where toxic and flammable gases are used and stored in gaseous or liquid form. Referenced
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