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The purpose of this Document is to standardize requirements for 1
org in March 2018
SEMI C93-0522E (editorial change)
This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15
SEMI C91-1115 (replaced by SEMI F118)
C00355 - SEMI C3.55 - Specification for Silane (SiH4), Bulk, 99.994% Quality StdPbc-0920 The purpose of this DocumentThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published February 2000; previously published October 2011. The purpose of this Document is to provide specifications for silane (SiH4) that is used in the semiconductor industry. This
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