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SEMI 3D2-0113 (first published)
SEMI M79-0623 (technical revision)
範圍（第2節）
a variety of failure criteria are included to permit separation of so-called intrinsic and extrinsic oxide failures
The test methods for the individual properties have been given in this Standard
PV06600 - SEMI PV66 - 太阳能电池电极栅线高宽比测试：激光扫描共聚焦显微镜法 StdTpc-Ball Grid Arrays SEMI 3D2-0113 (first published)This Standard was technically approved by the Photovoltaic Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in July 2015. NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and